Precautions to Take When Using a Vacuum Sputtering System

Guest post is provided by Denton Vacuum, LLC, offering vacuums for plasma-enhanced chemical vapor deposition. View their website for more information.

A vacuum evaporation system for sputtering is amazing technology that allows thin layers of substrate to be laid on a particular target that is only microns thick. Although this is incredibly applicable to industries like automotive and semiconductor manufacturing, it is required that a highly trained and certified professional operate the device. Misuse of a sputtering machine not only damages sensitive components and weakens results, it can also be extremely dangerous to the people around it.

Sputtering systems use high electron beam and high heat systems that can be compared to the scale of radiation emitted from the sun that has been observed to have an impact on objects as large as the Moon and Mars. So proper use and care in a laboratory is essential for the safety of all. Vacuums must have an air tight seal in order to properly coat targets without impurities.

Gloves must be used at all times when operating the machine. Touching the system with your bare hands is not only potentially harmful to you, but the oils in your skin will out-gas and contaminate films created henceforth. If the vacuums are used improperly, the diamond like carbon film created by the process will be significantly weakened. Sputtering systems are incredibly expensive because of the results they are able to achieve, so only allowing qualified workers to use the machines is paramount to its longevity. All contaminations should be reported immediately and fixed to prevent further and more complicated contaminations.

Proper care and cleaning of the machine must also be done through alumina impregnated sand paper, blasted glass and chemical baths. An expert operator will know how to properly care for the device with years of experience.